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〈1181〉 Scanning Electron Microscopy

INTRODUCTION

Over the last few decades, electron microscopy has become a reliable investigative tool for the study of solid and semi-solid materials. Since the invention of the electron microscope attributed to Max Knoll in 1935 and commercialization in the 1960's by Cambridge Instrument Co. and JEOL, recent improvements in resolution, stability, and specimen accommodation have resulted in a robust array of commercial instrumentation that spans a wide range of capabilities. This chapter provides a review of the common electron microscopy technologies and techniques.

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